Measurement of bandgap energies in low-k organosilicates
نویسندگان
چکیده
M. T. Nichols, W. Li, D. Pei, G. A. Antonelli, Q. Lin, S. Banna, Y. Nishi, and J. L. Shohet Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA Lam Research, Tualatin, Oregon 97062, USA T.J. Watson Research Center, IBM Corporation, Yorktown Heights, New York 10598, USA Applied Materials, Sunnyvale, California 94085, USA Department of Electrical Engineering, Stanford University, Stanford, California 94305, USA
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